Paper Title
Page
Authors: Nobumasa Yokemura, Kenichiro Imai, Hiroshi Hashimoto
Abstract:In this study, basic experiments involving machining using a rotational tool were conducted with the aim of increasing the volume of material...
289
Authors: Jung Taik Lee, Eun Sang Lee, Jong Koo Won, Hon Jong Choi
Abstract:The polishing process of a silicon wafer is a critical factor in the fabrication of semiconductor. Because a globally planar and mirror-like...
295
Authors: Ian Hu, Tian Shiang Yang, Kuo Shen Chen
Abstract:Here we use 2-D models of fluid film lubrication and contact mechanics to calculate the contact stress and fluid (i.e., slurry) pressure...
305
Authors: Pei Lum Tso, Yao Cheng Chang
Abstract:Chemical Mechanical Polishing(CMP) is currently the most effective planarization method used in the semiconductor industry. Because of the...
311
Authors: Jhy Cherng Tsai, Wei Ching Lin
Abstract:Abrasive Free Polishing (AFP) is a polishing technology without abrasives and widely employed in copper-base semiconductor fabrications. This...
316
Authors: Ming Yi Tsai, W.Z. Yang
Abstract:The friction phenomenon was investigated to explore the relationship between the diamond conditioner, polishing pad and wafer of oxide film...
320
Authors: Ying Tung Chen, Ta Wei Lin, Yunn Shiuan Liao, Jung Sheng Chen, Chao Yu Lin, James C. Sung
Abstract:Sintered polycrystalline diamond cubicles were oriented to make CMP pad conditioners. The dressing experiments demonstrated the capability of...
326
Authors: Ying Tung Chen, Chen Chin Yu, Cheng Shiang Chou, Chih Chung Chou, Yang Liang Pai, Zong Qing Yang, Mu Han Cheng, Tien Chen Hu, Michael Sung, James C. Sung
Abstract:Diamond disks are indispensable for dressing CMP pads in the manufacture of semiconductors. Conventional diamond disks contain one type of...
332
Authors: Feng Jiang, Jian Feng Li, Jie Sun, Song Zhang, Lan Yan
Abstract:For the analysis of cooling effect, the cutting inserts were heated to 900°C and then exposed in the room-air and cold-air with different...
341
Authors: Jaharah A. Ghani, Mohd Nor Azmi Mohd Rodzi, Kamal Othman, Che Hassan Che Haron
Abstract:Machining is one of the most important processes in producing automotive component such as difficult-to-cut FCD700 cast iron grade. Efforts...
347
Showing 51 to 60 of 169 Paper Titles