Paper Title
Page
  | Authors: Kazuya Yamamura, Tatsuya Takiguchi, Masaki Ueda, Azusa N. Hattori, Nobuyuki Zettsu
Abstract:A novel machining method combined with the irradiation of atmospheric pressure plasma was proposed for the finishing of difficult-to-machine...
423
Authors: Yong Guang Wang, Liang Chi Zhang
Abstract:Chemo-mechanical polishing (CMP) has been a useful method to produce superior brittle wafer surfaces. This paper reviews the CMP of silicon...
429
Authors: Fei Hu Zhang, Xing Bin Yu, Yong Zhang, Yong Yong Lin
Abstract:Ultrasonic- magnetorheological combined finishing (UMC) is a new technique for the ultraprecision machining of aspheric surfaces, especially...
435
Authors: Shinichi Ninomiya, Manabu Iwai, Kazuyoshi Takano, Toshiharu Shimizu, Kiyoshi Suzuki
Abstract:This paper deals with a technique to easily suppress bad odor of water-soluble coolant (working fluid) by using a commercially available ion...
441
Authors: Ken Chuan Cheng, Kuan Yu Chen, A Cheng Wang, Yan Cherng Lin
Abstract:Abrasive flow machining (AFM) is a simple and efficient method to remove recasting layers making by wire electrical discharge machining...
447
Authors: Shizuichi Higuchi, Mitsuru Sugisaki, Hideo Kato, Kazuya Okawa
Abstract:Pyramidal structured lapping film, which has minute pyramidal structures formed by abrasive grains and adhesives on polyester films, is newly...
457
Authors: Pai Shan Pa
Abstract:This paper studies the performance assessment of magnetic-assistance electrochemical finishing using an effective design system and magnetic...
463
Authors: Alex Fang, Elena Castell Perez, Alex Puerta Gomez, Song Sheng Zhou, Jason Sowers
Abstract:This paper is aimed at developing an efficient process, in terms of the material removal rate (MRR), for the lapping of polycrystalline...
469
Authors: Yin Biao Guo, Wei Yang, Zhen Chen, Yun Feng Peng
Abstract:In this paper, the with-in-wafer non-uniformity (WIWNU) of the lager quadrate optic in the fast polishing process (FPP) is discussed from the...
475
Authors: Wataru Natsu, Takeshi Miyata
Abstract:In this study, a method is proposed to fabricate the polishing tool with an elastic membrane in thickness of 10 to 120μm, by using the...
481
Showing 71 to 80 of 169 Paper Titles