Study on Planar Motion Table System for Nano-Machining Based on Aerostatic

The importance of nano-machining processes is continually increasing in a wide range of industries, In order to meet such industrial requirements, it is necessary to develop an ultraprecision machine tool based on a new design concept. Therefore, in this paper, a novel linear motor-driven aerostatic planar motion table system was developed for nano-machining. The results of actual machining tests confirmed that the developed table system has a remarkable performance.