Paper Title:
Positioning of Characteristic Points in IC Chip’s Micro-Topography Based on Cross Correlation Matching and Image Projection Transformation
  Abstract

In accurate optical inspection of IC chip, it is necessary to recognize and calibrate the IC micro-topography completely and accurately. Positioning method of characteristic points in IC chip’s micro-topography based on cross correlation matching and image projection transformation is investigated to realize high precision detection of surface topography. On the basis of extracting wavelet high-frequency components of IC topography conjugate images which is shot by high- definition CCD cameras from different space positions, the coordinate information of some selected topography’s characteristic points is shown. Cross correlation matching is applied to definite the characteristic point’s relative positions in the projected images, then relationship of image projection transformation is established for calculating and determining the characteristic point’s absolute coordinates, which facilitates following topography detection of IC chip. Experiment analysis and data comparison indicate that accurate coordinate positioning results of characteristic points can be obtained by this method, the research basis for following IC topography model structuring and micro- flaw characteristic detecting can also be provided.

  Info
Periodical
Advanced Materials Research (Volumes 139-141)
Edited by
Liangchi Zhang, Chunliang Zhang and Tielin Shi
Pages
1996-2001
DOI
10.4028/www.scientific.net/AMR.139-141.1996
Citation
Z. W. Liang, C. L. Zhang, Y. J. Wang, Y. D. Hu, "Positioning of Characteristic Points in IC Chip’s Micro-Topography Based on Cross Correlation Matching and Image Projection Transformation", Advanced Materials Research, Vols. 139-141, pp. 1996-2001, 2010
Online since
October 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Da Wei Qi, Yuan Yuan Zhou, Xi Yang
Abstract:In order to identify the Amur tiger individual more accurately and conveniently, a new characteristic of Amur tiger is proposed in this...
662
Authors: Wen Tao Zhang, Chuan Yang, Bao Wu Zhang, Xian Ming Xiong
Chapter 4: Technology and Processes: Applications, Equipment and Researching
Abstract:Relationship between texture characteristics of laser speckle pattern and surface roughness of turning machinery metal surface was studied in...
413
Authors: Qian Wen, Xiang Dong Gao
Chapter 3: Mechanical Engineering and Applied Mechanics
Abstract:Metal vapor plume and spatters are the important phenomena in the process of high power disk laser welding, and there exists a close...
330
Authors: Xiao Qiang Zhao, Ying Zhang, Si Jie Li, Han Lu Wang
Chapter 2: Biochemical Materials, Environmental Materials and Chemistry Processing
Abstract:With the algae play an important role in water eutrophication, a set of measuring system of water eutrophication based on the algae...
329
Authors: Jing Zhou, Xiao Lin Chen, Shi Jun Li, Dong Yan Huang, Guo Ze Ma
Chapter 2: Sensors, Measurement and Detection
Abstract:The 3D coordinates of measured point is embodied in 2D image coordinate of the optical characteristic point via the visual measurement...
895