Paper Title:
Rapid Fabrication of Micro Optical Elements Using DMD-Based Maskless Lithography Technique
  Abstract

A low-cost microfabrication tool based on digital mirror device(DMD) is presented in this paper. The imaging principle of the system is described and the fabrication methods for binary and nonbinary micro optical elements(MOE) are also discussed in detail. It is expected to provide an understanding of MOEs fabrication using DMD-based maskless lithography technique.

  Info
Periodical
Advanced Materials Research (Volumes 146-147)
Edited by
Sihai Jiao, Zhengyi Jiang and Jinglong Bu
Pages
143-146
DOI
10.4028/www.scientific.net/AMR.146-147.143
Citation
X. W. Guo, Q. M. Dong, "Rapid Fabrication of Micro Optical Elements Using DMD-Based Maskless Lithography Technique", Advanced Materials Research, Vols. 146-147, pp. 143-146, 2011
Online since
October 2010
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