Paper Title:
The Design of Three-Dimensional Vibration Sensor Based on SOI Microfabbrication
  Abstract

Compared with the traditional vibration sensors, the micro-vibration sensor have many advantages, such as small size, high sensitivity and low noise which is based on micro-fabbrication.This paper introduced the micro-vibration sensors which sensitive structure are cilium and micro-elastic beams. The micro-vibration sensors were produced by the inductively coupled plasma technology (ICP), the maximal etching depth of which can be greater than 300μm, the thickness of beam is less than 20μm and the longth of cilium are more than 3000um.The sensitivity of the sensor is 102.5μV/g, the measurement range to +20g, and the resonant frequency is 2KHz.

  Info
Periodical
Advanced Materials Research (Volumes 148-149)
Edited by
Xianghua Liu, Zhengyi Jiang and Jingtao Han
Pages
152-156
DOI
10.4028/www.scientific.net/AMR.148-149.152
Citation
G. X. Shi, G. J. Zhang, J. Xu, X. Y. Wang, "The Design of Three-Dimensional Vibration Sensor Based on SOI Microfabbrication", Advanced Materials Research, Vols. 148-149, pp. 152-156, 2011
Online since
October 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Heng Liu, Feng Tian Zhang, Wei Su, Fu Tang Zhang
Abstract:The introduced resonant accelerometer makes use of the equivalent electrostatic stiffness to sense the acceleration. The sensitivity can be...
122
Authors: Jun Li Lv, Yu Li Dong, Jian Dong Sun
Chapter 3: Vibration Control and Condition Monitoring
Abstract:The study shows that, the vibration of structures and members has very obvious self-excited vibration characteristic under the action of...
760
Authors: Chun Ping Tang, Liang Liang Zhang
Chapter 2: Bridge Engineering
Abstract:Non-linear numerical simulation is done on A-type super high pier by using finite element analysis software ANSYS, obtaining the node stress...
1329
Authors: Zhi Cheng Huang, Ze Lun Li
Chapter 3: Applied Mechanics in Material Engineering
Abstract:Took a type of fully-automatic hydraulic press beam as the object of study, established its 3D model by CAD Pro-E, and then import them into...
613
Authors: Yu Liu, Shen Liu, Wen Ji Xiong, Hong Ming Zeng
Chapter 3: Advanced Mechanical, Manufacturing and Building Engineering, Control Technology
Abstract:Establishing the system model of free beam vibration gyro under the influence of the Support structure, deriving and analyzing its vibration...
476