The textured thin films of fluorine-doped tin oxide (FTO) were prepared onto preheated glass substrates by a spray pyrolysis technique, using dehydrate stannous chloride (SnCl2:2H2O) and ammonium fluoride (NH4F) mixed with alcohol, as precursor. The haze and properties of the films heat treated at different temperatures from 400 to 550 were characterized by X-ray diffraction (XRD), 3D Digitale Mikroskop, Atomic Force Microscopy, UV-Vis spectrometer, sphere photometer and four-probe instrument. The results show that, with the increase of the substrate temperature, XRD peaks become sharper, the grain sizes grow up rapidly, and the crystal structure is improved gradually; the surface topography become like the islands and the haze achieves 16.47%. The lowest sheet resistance of the films is 9.7Ω/□. The effect of the substrate temperature on the haze, electric property and optical transmittance of the FTO films has been discussed in detail. The results show textured SnO2:F thin film deposited onto preheated glass substrates by a spray pyrolysis technique would be used as transparent electrode in amorphous silicon(a-Si) solar cells due to its excellent properties.