A new TiCN-coated aluminum foil for capacitor was prepared by multi-arc ion plating method. The effects of cooling process and mass flow ratio of C2H2 to N2 for deposition on specific capacitance were investigated. Using SEM and XRD, the surface micrograph and phase transformation were analyzed and the temperature sensitivity of specific capacitance was discussed. The results show that specific capacitance of TiCN-coated aluminum foils was as high as 1600μF/cm2, which is higher than the traditional etching process increases by about 2-fold. It was found that composite foil has a strong temperature sensitivity, with the temperature increasing, the aluminum foil surface of TiCN particles were found a gradual trend of growing up, crystal structure from amorphous to crystalline transition, when the temperature was higher than 200°C, the specific capacitance decreased more quickly.