Paper Title:
Research on Micromachined Gyroscope with Electrostatic Drive and Meso-Piezoresistive Detection
  Abstract

In this paper, the structure design and operating principle is introduced to micromachined gyroscope with electrostatic drive and piezoresistive detection. In the paper, the piezoresistive effect of multi-barrier nano-film is used as detection method, which achieves high piezoresistive sensitivity compared with Silicon piezoresistive device. The gyroscope structure and multi-barrier nano-film device is fabricated by using heteroepitaxy GaAs film on Si substrate which implements the process compatible. The natural frequencies of gyroscope are determined from the modal analysis.

  Info
Periodical
Advanced Materials Research (Volumes 154-155)
Edited by
Zhengyi Jiang, Xianghua Liu and Jinglong Bu
Pages
119-123
DOI
10.4028/www.scientific.net/AMR.154-155.119
Citation
Y. B. Shi, R. R. Wang, K. Du, J. Liu, "Research on Micromachined Gyroscope with Electrostatic Drive and Meso-Piezoresistive Detection", Advanced Materials Research, Vols. 154-155, pp. 119-123, 2011
Online since
October 2010
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$32.00
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