Paper Title:
Displacement Amplification of Electrostatically-Driven Microgripper in a Hybrid Design with Electrothermal Actuation
  Abstract

By the growing development of micro electromechanical systems, the application of microgrippers for handling and assembling of microparts attracts more attention. In this paper, an electrostatic microgripper using comb drive mechanism is designed and a formulation is presented to predict the critical voltage for pull-in instability threshold. Then the advantages of a modified model of electrothermal U-shape actuator with large forces and bilateral displacement are utilized to amplify the output displacement range of microgripper prongs. To show this amplification, finite element simulations are performed on the primary and modified microgripper proposed models.

  Info
Periodical
Edited by
Dehuai Zeng
Pages
313-320
DOI
10.4028/www.scientific.net/AMR.159.313
Citation
M. Hamedi, P. Salimi, M. Vismeh, "Displacement Amplification of Electrostatically-Driven Microgripper in a Hybrid Design with Electrothermal Actuation", Advanced Materials Research, Vol. 159, pp. 313-320, 2011
Online since
December 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Abid Ali, R.A. Azim, U.S. Khan, A.A. Syed, U. Izhar
Chapter 7: Computer-Aided Design and Technology
Abstract:This work presents the design and optimization of out of plane electrothermal MEMS actuators. The proposed concept is capable of generating...
1939
Authors: Ling Zhou, Xue Jin Shen, Zhen Lu Wang, Yi Hu
Chapter 3: Micro Actuators
Abstract:As the power producer, the micro actuator is an important part of the micro electro- mechanical system, which is used as the conversion of...
528
Authors: Jitendra Pal, Yong Zhu, Jun Wei Lu, Dzung Viet Dao
Chapter 2: MEMS and Mechatronics, Image Processing and Applications
Abstract:In this paper RF MEMS switchis designed for dielectric-embedded electronically switched multiple-beam (DE-ESMB) antenna array. To achieve...
264