This research proposes a wireless RFID-based thermal bubble accelerometer design, and relates more particularly for the technology to manufacture it on a flexible substrate. The key technology is to integrate both a thermal bubble accelerometer and a wireless RFID antenna on the same substrate, such that the accelerometer is very convenient for usage. In this paper we use xenon inert gas in the chamber with heavier molecular weight to increase the acceleration sensitivity instead of traditional air or carbon dioxide. On the other hand, the specific heat of xenon gas is also lower so that the bandwidth of the proposed accelerometer is larger and the power consumption is lower. In addition, the inner shape of the chamber is changed as hemisphere instead of rectangular type, comparisons are also made. We have seen that the sensitivity of the proposed design is better.