Paper Title:
Hydrogen Dilution Influence on the SiC Films Preparation and Structural Properties as the Window Layer of p-i-n Solar Cell
  Abstract

The SiC thin films as the window layer of p-i-n solar cell was prepared by PECVD technology in this article,investigated the influence of hydrogen dilution on the structure and optical properties of SiC thin films,found the optimal growth craft under the same conditions. The results showed that the optical band-gap of the window layer achieved the widest 2.2ev when hydrogen dilution rate was 6.25, furthermore, got inerratic surface morphology with deposition rate up to 0.1nm / s.

  Info
Periodical
Advanced Materials Research (Volumes 160-162)
Edited by
Guojun Zhang and Jessica Xu
Pages
1228-1232
DOI
10.4028/www.scientific.net/AMR.160-162.1228
Citation
B. Y. Xu, H. D. Yang, B. Huang, J. D. Shi, "Hydrogen Dilution Influence on the SiC Films Preparation and Structural Properties as the Window Layer of p-i-n Solar Cell", Advanced Materials Research, Vols. 160-162, pp. 1228-1232, 2011
Online since
November 2010
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Price
$35.00
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