Paper Title:
Structure and Composition Study of InSb Films Prepared by Radio-Frequency Sputtering
  Abstract

We present a systematic study of the effect of the sputtering parameters on the structure and composition of InSb film. The effect of the sputtering parameters on the crystallographic structure of InSb films is discussed in terms of the kinetic energy of the particle bombarding the growing film. Measurements of the chemical composition show that In to Sb concentration ratio increases with the increase of working pressure because Sb atoms are more rapidly thermalized by collisions with argon atoms during the transport process of the sputtered atoms. And the composition of the films is governed by the Sb re-evaporation process at the surface of the growing films. In to Sb concentration ratio is enhanced by increasing the substrate temperature (essentially) or RF power.

  Info
Periodical
Advanced Materials Research (Volumes 160-162)
Edited by
Guojun Zhang and Jessica Xu
Pages
886-890
DOI
10.4028/www.scientific.net/AMR.160-162.886
Citation
Y. P. Yao, C. L. Liu, H. D. Qi, X. Chang, C. W. Wang, "Structure and Composition Study of InSb Films Prepared by Radio-Frequency Sputtering", Advanced Materials Research, Vols. 160-162, pp. 886-890, 2011
Online since
November 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: L.L. Pranevičius, Claude Templier, Donatas Mickevičius
Abstract:Surface atoms are activated as result of replacement collisional sequences in solids by incident ions. In dependence on theirs threshold...
165
Authors: Kenkichiro Kobayashi, Tsutomu Yamazaki, Yuji Hatta, Yasumasa Tomita
79
Authors: Yu Jun Zhang, Guang Neng Dong, Jun Hong Mao, You Bai Xie
Abstract:The novel frictional properties of hydrogenated DLC (Diamond-like Carbon) films have been reported for nearly ten years. But up to now,...
108
Authors: Zheng Han Hong, Shun Fa Hwang, Te Hua Fang
Abstract:The mixing situation of Co atoms implanting onto Cu(001) substrate is investigated with regard to incident energy and substrate temperature...
375
Authors: Jen Ching Huang, Yi Chia Liao, Huail Siang Liu, Fu Jen Cheng
Chapter 1: Nanoscience and Nanotechnology
Abstract:This paper studies the deposition process and mechanical properties of Cu thin films deposited on single crystal copper substrates with...
37