In order to make quantitative analysis by internal standard method, 24 standard curves of inorganic compounds including quartz, corundum, TiO2, BaTiO3, etc. were obtained and the corresponding quantitative analyses were accomplished based on the quantitative analysis software attached in Rigaku D/Max-2200 X-Ray diffractometer. Results show that the coefficient of association R of the as-prepared curves are at the range of 0.928－0.980. By validating the samples with due content, it reveals that the analytical results are consistent with the actual values well, which indicate that the prepared standard curves are suitable for high-precision XRD phase quantitative analysis. Uniformity of samples is an important factor in the quantitative analysis by internal standard method.