Paper Title:
Semi-Cylindrical Hyperlens Made of Al/MgO for 20nm Lithography Node
  Abstract

A purposed semi-cylindrical hyperlens is designed for nanolithography, which can form 20nm (or less) line width patterns with 193nm working wavelength. The hyperlens employs aluminum (Al, @193nm wavelength) and magnesium oxide (MgO, ) as the materials of alternating metal and dielectric thin layers. Taking aluminum instead of silver is a more economic solution for manufacture, and the dielectric coating acts as an anti-reflectivity of aluminum to enhance transmission. The optimum thickness of aluminum for best image fidelity has been found based on two 20nm wide slits with 40nm spacing. Incorporated with phase shifting mask (PSM) technology, the image contrast is much better than that of ordinary mask (Chrome on Glass, COG). The full wave simulations are executed and the results validated our approaches. The semi-cylindrical hyperlens made of aluminum and magnesium oxide gives potential for nano-scale manufacture, optical information storage and biomedical imaging.

  Info
Periodical
Advanced Materials Research (Volumes 179-180)
Edited by
Garry Zhu
Pages
1047-1052
DOI
10.4028/www.scientific.net/AMR.179-180.1047
Citation
L. Cheng, P. F. Cao, Q. Q. Meng, X. P. Zhang, "Semi-Cylindrical Hyperlens Made of Al/MgO for 20nm Lithography Node", Advanced Materials Research, Vols. 179-180, pp. 1047-1052, 2011
Online since
January 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Xiao Jun Wan, Hui Xia Jin
Abstract:The special physicochemical environment caused by sonic-vacating provides an important outlet for the preparation of highly efficient...
566
Authors: Xiao Hui Liu, Kai Yong Jiang, Jun Yi Lin
Abstract:Phase-based Stereo Matching (PSM) is an efficient matching method in binocular stereo vision. It bases on correspondence points which have...
2633
Authors: Bing Han, Geng Liu, Hai Wei Wang
Chapter 3: Manufacturing Systems Modeling and Optimization
Abstract:Automobile, aerospace, and other industrial sectors have evolved over years on product life-cycle management (PLM) systems. Product design...
1046
Authors: Hong Yan Zhang, Xiao Yi Lv, Zhen Hong Jia
Chapter 11: Optical/Electronic/Magnetic Materials
Abstract:The present work reports the electrochemical anodization for porous silicon microcavity (PSM) fabrication, including the number of layers and...
1960
Authors: Wu Jian Yan, Yu Cheng Shi
Chapter 4: Seismic Engineering
Abstract:In this paper, we simulated two-dimension numerical on the strong ground motion through the hybrid scheme based on the pseudo-spectral method...
1858