CNT-based integrated components show potential application in many fields. The growth of carbon nanotube is very important process for the fabrication of CNT-based component. Self-aligned growth of carbon nanotube method by gas-flowing techniques is reported in this paper, which results in CNT growth along gas-flow direction. The effect of gas-flow was analyzed with numerical simulation and the growth optimization was put forward. Scanning electronic microscopy (SEM) images demonstrate that the self-aligned carbon nanotube can be realized by a gas-flowing CVD process and the distribution of carbon nanotube can be controlled by the gas-flowing rates. This research provides a parallel method for the large-scale integration of carbon nanotube into electronic, optoelectronic, and sensing systems.