A Removal Modus of Thin Film Nanostructures via a Gear Form Tool |
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| Journal | Advanced Materials Research (Volumes 181 - 182) |
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| Volume | Advanced Materials Science and Technology |
| Edited by | Qi Luo and Yuanzhi Wang |
| Pages | 955-958 |
| DOI | 10.4028/www.scientific.net/AMR.181-182.955 |
| Citation | Pai Shan Pa, 2011, Advanced Materials Research, 181-182, 955 |
| Online since | January, 2011 |
| Authors | Pai Shan Pa |
| Keywords | Electrochemical Removal, Gear Shaped Tool, Nano Structure, Precision Recycle, Semiconductor, Thin Film |
| Abstract | A effective method for the precision electrochemical removal of thin film nanostructures from LCD panels using a gear-shaped electrode tool has been developed. This ultra-precise process effectively removes defective Indium-Tin-Oxide layers allowing LCD panels to be returned to the production line and significantly reduces costs. In the current experiment a 7th Generation TFT-LCD panel was used. A high rotational speed of the gear-shaped negative electrode elevates discharge mobility and improves the removal effect. Pulsed direct current can improve the effect of dregs discharge and is advantageous when combined with a fast workpiece feed rate. A fast feed combined with a high current flow results in very effective removal of the color filter layer. A negative electrode of large diameter with a small edge radius provides higher current density and also improves the removal affect. This novel design using electrochemical removal as a precision recycling process for removing ITO layers from LCD panels is clean, effective and very fast. |
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