Paper Title:
Study of Stress in TiO2 Films Grown by Electron-Beam Evaporation

TiO2 films were fabricated on Si substrate by using electron-beam gun evaporation. Influence of deposition rate, deposition temperature and ion beam bombarding on stress in TiO2 films was studied by AFM and XRD. The results show that deposition temperature of 423K and deposition rate of 0.2nm/s, the average stress in titanium oxide thin films is less than 48.2MPa. The average stress decreases to compressive stress of 16.7MPa from tensile stress of 72.9MPa by the ion beam energy of 113eV and bombarding time of 300s. The microstructure change of TiO2 films is main factors of stress development.

Advanced Materials Research (Volumes 189-193)
Edited by
Zhengyi Jiang, Shanqing Li, Jianmin Zeng, Xiaoping Liao and Daoguo Yang
T. Chen, D. S. Wang, Y. Q. Xiong, "Study of Stress in TiO2 Films Grown by Electron-Beam Evaporation", Advanced Materials Research, Vols 189-193, pp. 1233-1237, Feb. 2011
Online since
February 2011
US$ 28,-
Authors: X.P. Zhu, Tsuneo Suzuki, Hisayuki Suematsu, Wei Hua Jiang, Koichi Niihara
Abstract:Nitriding of titanium was achieved in a vacuum of ~2×10-2 Pa by applying intense pulsed ion beam (IPIB) irradiation. Various phases including...
Authors: Ke Zhong, Jing Hu, Bin Zheng
Chapter 1: Key Engineering Materials
Abstract:Firstly the pavement compound system model of steel beam and steel-concrete combined section are established based on structure...
Authors: Chun Ping Tang, Liang Liang Zhang
Chapter 2: Bridge Engineering
Abstract:Non-linear numerical simulation is done on A-type super high pier by using finite element analysis software ANSYS, obtaining the node stress...
Authors: A. Kosyachkov, L. Wang, J. Anzellotti, R. Hallock, C. Hodgson
Chapter 6: Devices
Abstract:Abstract. Microstructural, optical and mechanical properties of oxide and fluoride films are examined. Superior optical quality, durability...
Authors: Chen Ying Wang, Shu Ming Yang, Qi Jing Lin, Zhuang De Jiang
Chapter 2: Sensors, Measurement and Detection
Abstract:The accuracy and traceability of measurement at nano-scale are directly related to nano-fabrication. Nanostep is typical structure, so the...