Paper Title:
The Effect of Speed Matching on the CMP Uniformity
  Abstract

In the chemical mechanical polishing process, the relationship of relative motion of polishing pad and polishing head plays very important role for CMP quality. This paper established the mathematical model in order to investigate the relative motion of polishing pad and polishing head. It was found that the speed ratio of polishing pad and polishing head shows great influence on the CMP uniformity. And when the value of speed ratio of relative rotation approaches 1.23, the distribution of abrasives’ trajectories is close and uniform. Theoretically, the surface quality of workpiece is better.

  Info
Periodical
Advanced Materials Research (Volumes 189-193)
Edited by
Zhengyi Jiang, Shanqing Li, Jianmin Zeng, Xiaoping Liao and Daoguo Yang
Pages
4154-4157
DOI
10.4028/www.scientific.net/AMR.189-193.4154
Citation
Z. X. Guo, J. Zhai, H. Zhang, Q. Z. Li, "The Effect of Speed Matching on the CMP Uniformity", Advanced Materials Research, Vols. 189-193, pp. 4154-4157, 2011
Online since
February 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Hui Yuan, Xin Wei, H.W. Du, W. Hu, Wei Xiong
Abstract:Lithium tantalite (LiTaO3) possesses a combination of unique electro-optical, acoustic, piezoelectric, pyroelectric and non-linear optical...
561
Authors: Yu Li Sun, Dun Wen Zuo, Jun Li, Wen Zhuang Lu, Z.Z. Yu
Abstract:Ice fixed abrasives (IFA) polishing is a novel ultra-precision machining method. The motion tracks of abrasives during IFA polishing have an...
376
Authors: Jian Xiu Su, Xi Qu Chen, Jia Xi Du, Xiu Ying Wan, Xin Ning
Abstract:In order to understand the material removal mechanism in the process of chemical mechanical polishing (CMP), the states of abrasives in the...
658
Authors: Qiu Sheng Yan, Jie Wen Yan, Jia Bin Lu, Wei Qiang Gao
Abstract:A new planarization polishing method based on the cluster magnetorheological (MR) effect is presented to polish optical glass in this paper....
18
Authors: Wen Yan, Yu Mei Huang, Feng Gao, Yao Liu
Precision Manufacturing Technology and Measurements
Abstract:A method of double-side displacement-rotation flat-lapping with solid abrasives is proposed and a CNC machine tool is developed in this...
1752