Paper Title:
Structure and Property of CrAlN Coatings Prepared by Bipolar Pulsed Dual Magnetron Sputtering (BPDMS) under Different Pulse Bias Voltage
  Abstract

Recently, Cr-Al-N coatings have received more and more attention of researchers owing to its standing-out mechanical performances and superior chemical stability. In this present work, CrAlN ternary coatings were deposited by a bipolar pulsed dual magnetron sputtering (BPDMS) method and the effects of substrate negative bias on deposition rate, structure, hardness and adhesion of the coatings were investigated. The application of appropriate negative substrate bias voltage leads to dense structure, high hardness and excellent adhesion for CrAlN coatings.

  Info
Periodical
Advanced Materials Research (Volumes 189-193)
Edited by
Zhengyi Jiang, Shanqing Li, Jianmin Zeng, Xiaoping Liao and Daoguo Yang
Pages
668-671
DOI
10.4028/www.scientific.net/AMR.189-193.668
Citation
M. S. Li, Y. Z. Fan, S. J. Zhang, C. J. Feng, "Structure and Property of CrAlN Coatings Prepared by Bipolar Pulsed Dual Magnetron Sputtering (BPDMS) under Different Pulse Bias Voltage", Advanced Materials Research, Vols. 189-193, pp. 668-671, 2011
Online since
February 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Ming Sheng Li, Shu Juan Zhang, Jiao Huang, Li Zhen Zhang
Chapter 2: Fundamental Materials Science
Abstract:In this study, composite metastable (Ti,Al,Nb)N coatings were respectively deposited on a wrought martensite steel 1Cr11Ni2W2MoV by arc ion...
141
Authors: Long Lu, Guang Guang Feng
Chapter 13: Surface Engineering/Coatings
Abstract:40Cr steel substrate was coated with Ti0.33Al0.67N films by Multi-arc ion technology. Analyses of substrate negative...
1235
Authors: Chen Gang Luo, Hao Zhang, Jin Shang, Shu Wang Duo
Chapter 5: Emerging Inorganic Non-Metallic Materials
Abstract:CrN coatings were deposited by reactive magnetron sputtering at different substrate bias voltages. The effects of bias voltage on...
777