Paper Title:
Effect of RF Sputtering Power on the Structural, Optical and Hydrophobic Properties of SiNx Thin Film
  Abstract

With a mixture gas of N2 and Ar, silicon nitride thin films were deposited on glass substrates by different radio frequency (RF) magnetron sputtering power without intentional substrate heating. The chemical composition, phase structure, surface morphology, optical properties, refractive index, hydrophobic properties of the films were characterized by X-ray energy dispersive spectroscopy(EDS), X-ray diffraction(XRD), field emission scanning electron microscopy(FESEM), ultraviolet-visible spectroscopy(UV-Vis), nkd-system spectrophotometer and CA-XP150 contact angle analyzer, respectively. The results showed that silicon nitride thin films were amorphous and rich in Si; the transmittance reduced but refractive index and surface roughness increased; and the hydrophobic properties of SiNx became better with the increase of RF power.

  Info
Periodical
Advanced Materials Research (Volumes 194-196)
Edited by
Jianmin Zeng, Taosen Li, Shaojian Ma, Zhengyi Jiang and Daoguo Yang
Pages
2340-2346
DOI
10.4028/www.scientific.net/AMR.194-196.2340
Citation
H. Y. Liang, Q. N. Zhao, F. Gao, W. H. Yuan, Y. H. Dong, "Effect of RF Sputtering Power on the Structural, Optical and Hydrophobic Properties of SiNx Thin Film", Advanced Materials Research, Vols. 194-196, pp. 2340-2346, 2011
Online since
February 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Bum Rae Cho
Abstract:Indium tin oxide (ITO) used in many applications such as electronic and optical devices were deposited on the soda lime glass substrate by...
195
Authors: Gaurav Shukla, Alika K. Khare
Abstract:TiO2 is a widely studied material for many important applications in areas such as environmental purification, photocatalyst, gas sensors,...
65
Authors: Feng Gao, Qing Nan Zhao, Xiu Jian Zhao, Yu Hong Dong
Abstract:Silicon Nitride thin films were deposited on glass substrates by r.f. magnetron sputtering with a mixture gas of N2 and Ar. The properties of...
1391
Authors: M.A. Hernández-Pérez, J.R. Aguilar-Hernández, Jorge Roberto Vargas-García, G.S. Contreras-Puente, E. Rangel-Salinas, Felipe Hernandez-Santiago, Marissa Vargas-Ramírez
Abstract:Cadmium Selenide (CdSe) thin films were prepared by pulsed laser deposition using a Nd:YAG laser (355 nm). Films were grown by ablating a...
134
Authors: Xiao Jing Wang, De Jun Li, Huan Qi Tao, Jun Wang
Chapter 11: Thin Films
Abstract:Aluminium doped ZnO (ZnO:Al) films were deposited on polymer substrates by RF magnetron sputtering. The effects of deposition temperatures on...
1871