A new ultrasonic peristaltic micro-fluid driving model was presented on the principle of ultrasonic traveling wave and volume displacing mechanism. First, driving principle of the model was introduced and finite element model was developed. Second, the transient dynamics analysis was performed to observe the chambers traveling and the fluid flowing. What’s more, harmonic analysis was done to get its amplitude-frequency response characteristics. Third,the coupling modes filled with fluid was performed to prove its drivng effect. This can provide a guidance for furture fluid structure analysis to get better performance and efficiency.