Paper Title:
Microring Resonator Chemical Sensor Based on Si3N4 Waveguides
  Abstract

Microring resonator based on Si3N4 waveguides was fabricated by using CMOS compatible processes with 1 µm wide waveguides and 200 µm in radius. The optical characteristic of the resonator was measured with a Q factor up to 20,000 and a free spectrum range (FSR) of 1 nm. The structure was further packaged to be a sensor for liquid sensing. Finally, the sensor was applied to detect concentrations of glucose solutions with sensitivity of 1.78×10-5 refractive index unit (RIU), which proves its functionality and feasible application as high sensitivity chemical sensor.

  Info
Periodical
Advanced Materials Research (Volumes 199-200)
Edited by
Jianmin Zeng, Zhengyi Jiang, Taosen Li, Daoguo Yang and Yun-Hae Kim
Pages
1954-1957
DOI
10.4028/www.scientific.net/AMR.199-200.1954
Citation
Y. Chen, "Microring Resonator Chemical Sensor Based on Si3N4 Waveguides", Advanced Materials Research, Vols. 199-200, pp. 1954-1957, 2011
Online since
February 2011
Authors
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Price
$32.00
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