Paper Title:
The Research on the Model of a Precision Magnetic Stage System
  Abstract

This paper introduces the structure and work principle of a two-coordinate precision magnetic stage. “The same plane” mode and magnetic driver is adopted, on the basis of analytical field, and response simulation is finished. The experiments result expresses that the positioning accuracy of the magnetic stage reaches nanometer accuracy.

  Info
Periodical
Advanced Materials Research (Volumes 201-203)
Edited by
Daoguo Yang, Tianlong Gu, Huaiying Zhou, Jianmin Zeng and Zhengyi Jiang
Pages
2079-2082
DOI
10.4028/www.scientific.net/AMR.201-203.2079
Citation
Y. Zhang, H. Z. Sun, H. Zhou, "The Research on the Model of a Precision Magnetic Stage System", Advanced Materials Research, Vols. 201-203, pp. 2079-2082, 2011
Online since
February 2011
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Price
$32.00
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