Paper Title:
Coupled Electro-Thermal-Mechanical Micro-Hotplate-Based for Micro Gas Pressure Sensor
  Abstract

In this paper, electro-thermal-mechanical theoretical analysis of micro-hotplate-based micro gas pressure sensor is carried out, which is on basis of the classical heat transfer theory and rarefied gas dynamics. Combined with micro-hotplate (MHP) theory analysis of heat transfer and thermal-mechanical finite element modeling, electro-thermal-mechanical coupled analysis of theoretical models with regard to the MHP-based micro gas pressure sensor is built. Then, through the ANSYS-one of the finite element analysis software-the simulation analysis of MHP went well. The simulation results show that MHP generates a smaller deformation because of adding the thermal conductivity, and MHP provides a more feasible analysis method in the theoretical study of micro hotplate.

  Info
Periodical
Advanced Materials Research (Volumes 204-210)
Edited by
Helen Zhang, Gang Shen and David Jin
Pages
1086-1089
DOI
10.4028/www.scientific.net/AMR.204-210.1086
Citation
R. C. Jin, M. L. Shao, L. S. Meng, Z. N. Tang, J. Q. Wang, "Coupled Electro-Thermal-Mechanical Micro-Hotplate-Based for Micro Gas Pressure Sensor", Advanced Materials Research, Vols. 204-210, pp. 1086-1089, 2011
Online since
February 2011
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Price
$32.00
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