Paper Title:
Sol-Gel Processing by Organic Polymer Addition for Silica Antireflective Coatings
  Abstract

Based on TEOS system and sol-gel process together with catalysts and organic polymer, the microstructure of SiO2 film is controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show an antireflective film produced by incorporation of organic polymer in the precursor solution is a more effective method of effect the uniformly porous structures of SiO2 thin film on the glass substrate.

  Info
Periodical
Advanced Materials Research (Volumes 211-212)
Edited by
Ran Chen
Pages
780-783
DOI
10.4028/www.scientific.net/AMR.211-212.780
Citation
R. M. Jin, D. Z. Li, Y. Tao, X. J. Han, "Sol-Gel Processing by Organic Polymer Addition for Silica Antireflective Coatings", Advanced Materials Research, Vols. 211-212, pp. 780-783, 2011
Online since
February 2011
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