Paper Title:
Design of a Topology Nano-Positioning Stage
  Abstract

Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro-technology equipment and manufacture. This paper presents a one-dimensional positioning system, adopting a PZT piezoelectric ceramic nano-positioning stage designed by multi-objective topological optimal synthesis. In order to obtain better performance, wedge-shaped structure has been applied as a precise pretension for the piezoelectric ceramic. Through finite element simulation and experimental verification, better static performance and smaller kinetic coupling are achieved, with up to 10 μm stroke displacement output and 5 nm resolution. This stage provides a novel, flexible, and efficient way in the design and optimization of the nano-positioning system.

  Info
Periodical
Advanced Materials Research (Volumes 211-212)
Edited by
Ran Chen
Pages
891-894
DOI
10.4028/www.scientific.net/AMR.211-212.891
Citation
T. Chen, L. G. Chen, M. Q. Pan, L. N. Sun, "Design of a Topology Nano-Positioning Stage", Advanced Materials Research, Vols. 211-212, pp. 891-894, 2011
Online since
February 2011
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Price
$32.00
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