Paper Title:
Design and Simulation of Capacitive Micromechaned Gyroscope
  Abstract

By researching and investigating the structure of capacitive gyroscopes, A novel capacitive micromachined gyroscope is proposed and the structure is designed. The method of electrostatic comber drive, capacitive detection of bar structure is used for the structure, and these make the gyroscope high sensitivity. The main air damping of the drive mode and detection mode is slide film damping, it is possible to make the gyroscope achieve high Q-values at atmospheric pressure. The decoupled gyroscope is designed, too. By large numbers of simulation analysis, frequencies of the first six steps mode are gained, nature frequencies of drive mode and sense mode of gyroscope are a close match, and rationality of the structure is validated. At last, the structure encapsulated is presented.

  Info
Periodical
Advanced Materials Research (Volumes 211-212)
Edited by
Ran Chen
Pages
909-913
DOI
10.4028/www.scientific.net/AMR.211-212.909
Citation
Y. B. Shi, X. J. Zhao, J. Tang, J. Liu, R. R. Wang, "Design and Simulation of Capacitive Micromechaned Gyroscope", Advanced Materials Research, Vols. 211-212, pp. 909-913, 2011
Online since
February 2011
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Price
$32.00
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