Paper Title:
Demonstration of Modification from AlF3 Re-Deposition to Polymer Re-Deposition on Air Bearing Surface (ABS) Etched Sidewall of Fluorine-Based Plasma Etch on Al2O3-TiC Substrate
  Abstract

In this work, C-F polymer rich re-deposition are generated on the etched side wall of the patterned Air Bearing Surface (ABS). This C-F rich polymer is a by product from using a Surface Technology Systems Multiplex-Pro Air Bearing Etch (ABE) tool that utilizes fluorine base plasma. The morphology of the re-deposition and elemental composition are investigated via scanning electron microscope. The chemical bonding information is characterized via attenuated total reflected infrared spectroscopy. The purpose of this work is to demonstrate the modification of AlF3 re-deposition to polymer rich re-deposition allows complete re-deposition removal with isopropyl alcohol base solution. This offers advantage as the re-deposition removal is incorporated during the resist strip process offering superior cleanliness of slider head without additional process steps.

  Info
Periodical
Edited by
Zhang Yushu
Pages
93-97
DOI
10.4028/www.scientific.net/AMR.213.93
Citation
C. Pakpum, K. Siangchaew, P. Limsuwan, "Demonstration of Modification from AlF3 Re-Deposition to Polymer Re-Deposition on Air Bearing Surface (ABS) Etched Sidewall of Fluorine-Based Plasma Etch on Al2O3-TiC Substrate", Advanced Materials Research, Vol. 213, pp. 93-97, 2011
Online since
February 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Fan Xiu Lu, Yu Mei Tong, X.H. Gao, Wei Zhong Tang, Cheng Ming Li, Guang Chao Chen
Abstract:In the present investigation a specially designed ceramic interlayer, which is able to supply suitable protection of the ZnS substrate...
3599
Authors: Li Gou, Ji Lei Zhu, Jun Guo Ran, Suang Feng Yan
Abstract:In order to improve the adhesion between diamond coatings and cemented tungsten carbide (WC-Co) substrates, the diamond coatings were...
1889
Authors: Tae Ho Shin, Ji Heang Yu, Shi Woo Lee, In Sub Han, Sang Kuk Woo, Byung Koog Jang, Sang Hoon Hyun
Abstract:This paper presents the work on the development of ceramic coating processing. Nano-structured zirconia coating has been developed with...
505
Authors: Ai Min Wu, Hong Yun Yue, X.Y. Zhang, Fu Wen Qin, T.J. Li, Xin Jiang
Abstract:The silicon nitride films have been deposited by Electron Cyclotron Resonance-plasma enhanced chemical vapor deposition (ECR-PECVD) method at...
1712
Authors: Xiao Peng, Kai Yong Jiang
Chapter 4: Engineering Material, Energy Science and Dynamic System in Mechanical Engineering
Abstract:Metallization treating on the plastic surface without the mask technology was created by using a new method combining the laser technique...
765