Paper Title:
Effect of Pressures on the Chemical Vapor Deposition of BN Using Borazine
  Abstract

Boron nitride coatings have been prepared by chemical vapor deposition using borazine as single precursor at 900 °C. The effect of the total pressure on the surface morphologies of the coatings was investigated. For low total pressures (≤ 3 kPa), the deposits presents a compact pebble-like surface structure. However, when high total pressures (> 3 kPa) were used, the surface of the coatings presents a loose grain-like feature. When the total pressure increases up to 12 kPa, the coatings shows a porous surface structure. The composition and structure of the deposited coatings were investigated by means of FTIR and XRD analysis. It shows that the coatings have a structure of turbostratic boron nitride.

  Info
Periodical
Edited by
Zeng Zhu
Pages
588-592
DOI
10.4028/www.scientific.net/AMR.214.588
Citation
J. S. Li, C. R. Zhang, B. Li, F. Cao, S. Q. Wang, "Effect of Pressures on the Chemical Vapor Deposition of BN Using Borazine", Advanced Materials Research, Vol. 214, pp. 588-592, 2011
Online since
February 2011
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