Paper Title:

Experimental Study on the Precision Lapping of Sapphire Substrate

Periodical Advanced Materials Research (Volume 215)
Main Theme Digital Design and Manufacturing Technology II
Edited by Congda Lu
Pages 291-294
DOI 10.4028/www.scientific.net/AMR.215.291
Citation Xiao Wang et al., 2011, Advanced Materials Research, 215, 291
Online since March, 2011
Authors Xiao Wang, Cong Da Lu, Dong Hui Wen
Keywords Experimental Study, Precise Lapping, Roughness, Sapphire
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Abstract

Experimental research on the surface quality parameters such as roughness and removal rate in the precision lapping of sapphire was promoted in this paper, effects of processing parameters as load, speed of rotation, grain size and density on sapphire surface quality was studied by experiments. Results showed that lapping load and rotate speed were the most important factors on the removal rate, grain size played a key role in the removal rate and roughness under the same conditions, profile tolerance of surface shape depends on the flatness.