Based on the study of the effect of parametric variation of quartz flexible accelerometer in storage condition, the varying mechanism and causes of bias and scale factor varying were analyzed. According to the analysis results of mechanism, the parts of finite element modeling and the parameters-input forms were determined. Considering the varying magnetic properties of permanent magnetic material impacted on the accelerometer, an approach of loading the servo-circuit formulas and modeling the quartz flexible accelerometer in ANSYS finite element analysis (FEA) software was given, and the algorithm process of FEA coupled magneto-structural simulation was also given. Finally, one certain accelerometer was simulated by FEA software, and a temperature testing was made. It is tested that the trend of the test under various temperature stress was consistent with that of the above output voltage values which is obtained by finite element simulation. Moreover, it demonstrates the correctness of the modeling and the analysis results.