Paper Title:
High-Efficiency SOI Photodetector Utilizing Surface Plasmon Resonance in Gold Corrugated Structure
  Abstract

We have investigated the absorption spectra of silicon-on-insulator (SOI) photodiode with Au thin film which is corrugated by SiO2 line-and-space structure. It is aimed for the high-efficiency of SOI absorption by surface plasmon resonance. The structural parameters such as SiO2 thickness, period of corrugation, and the duty-ratio were optimized by FDTD simulation.

  Info
Periodical
Edited by
Arturs Medvids
Pages
154-157
DOI
10.4028/www.scientific.net/AMR.222.154
Citation
A. Ono, H. Satoh, H. Inokawa, "High-Efficiency SOI Photodetector Utilizing Surface Plasmon Resonance in Gold Corrugated Structure", Advanced Materials Research, Vol. 222, pp. 154-157, 2011
Online since
April 2011
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