Paper Title:
Investigation of Adhesion Materials for Gold Line-and-Space Surface Plasmon Antenna on SOI-MOS Photodiode
  Abstract

In order to improve the light sensitivity of silicon-on-insulator metal-insulator-semiconductor (SOI-MOS) photodiode, differences caused by the adhesion materials for gold (Au) line-and-space (L/S) surface plasmon (SP) antenna in MOS structure are evaluated based on the electromagnetic simulation using finite difference time domain (FDTD) method.

  Info
Periodical
Edited by
Arturs Medvids
Pages
201-204
DOI
10.4028/www.scientific.net/AMR.222.201
Citation
H. Satoh, Y. Matsuo, H. Inokawa, A. Ono, "Investigation of Adhesion Materials for Gold Line-and-Space Surface Plasmon Antenna on SOI-MOS Photodiode", Advanced Materials Research, Vol. 222, pp. 201-204, 2011
Online since
April 2011
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