Paper Title:
Fabrication of the Field Emitter Array with a Built-in Suppressor Gate
  Abstract

To realize a fine focused electron beam less than several ten nm in diameter, the initial emission angle must be narrowed as much as possible. To control the initial emission angle, we have introduced a suppressor gate below the extractor gate electrode. The paper describes the fabrication of the field emitter array with a built-in suppressor gate.

  Info
Periodical
Edited by
Arturs Medvids
Pages
209-212
DOI
10.4028/www.scientific.net/AMR.222.209
Citation
Y. Takagi, A. Koike, T. Fujino, T. Aoki, Y. Neo, H. Mimura, T. Nishi, T. Yoshida, M. Nagao, K. Sakai, H. Murata, "Fabrication of the Field Emitter Array with a Built-in Suppressor Gate", Advanced Materials Research, Vol. 222, pp. 209-212, 2011
Online since
April 2011
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