Paper Title:
Design of an Electrostatics Lens of the Micro-Column Microscopes Using a Multi-Gated FEA
  Abstract

A crossover point was observed with a fabricated quintuple-gated micro-column by an enhanced knife-edge measurement. Developing this result, we designed a new tiny electron beam microscope using multi-gated micro-column by using scale down rule of a micro-column. A beam spot size of the proposed device was estimated to be 50nm by an electron beam trajectories simulation. Exact techniques were developed and demonstrated for the fabrication of the proposed device.

  Info
Periodical
Edited by
Arturs Medvids
Pages
94-97
DOI
10.4028/www.scientific.net/AMR.222.94
Citation
A. Koike, Y. Takagi, T. Fujino, T. Aoki, Y. Neo, H. Mimura, T. Yoshida, M. Nagao, K. Sakai, H. Murata, "Design of an Electrostatics Lens of the Micro-Column Microscopes Using a Multi-Gated FEA", Advanced Materials Research, Vol. 222, pp. 94-97, 2011
Online since
April 2011
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