The electrical discharge machining (EDM) is a process widely used in machining of complex geometries and hardened materials, conditions that often are not met by conventional machining processes. In EDM the electrode reproduces its image or geometry on the part and this image is obtained by chip removing process, which is given by high frequency electrical discharges, causing the melting and vaporization of electrically conductive materials. Due to this mechanism of material removal, the surface is subjected to high thermal loads, which heavily influences the surface quality of obtained parts. For the characterization of these surfaces must be considered the surface topography and the metallurgical changes of the subsurface layer, since both characteristics influence the functionality of the machined parts. In addition, several variables related to the EDM process have influence on the characteristics of the generated surface. This work presents a study of the influence of EDM process on the surface quality of square cavities. It was evaluated different regions of the cavities, such as side wall, bottom and corners. The results showed significant differences between the analyzed regions.