Paper Title:
Electromagnetic Modeling of Microwave Axial Injection Torch at Atmospheric Pressure Used for Thin Film Deposition
  Abstract

This article describes the three dimensional electromagnetic modeling of a microwave (2.45 GHz) plasma device, based on an axial injection torch (AIT). The model solves Maxwell's equations by the finite integration technique (FIT). We are interested in obtaining the optimal position of the short circuit in order to obtain the best percentage of coupling at 2.45 GHz. and understanding the influence of various geometrical parameters on the physical distribution of the electromagnetic field and on the power transfer within the structure.

  Info
Periodical
Edited by
El-Hachemi Amara and Djamila Bennaceur-Doumaz
Pages
105-110
DOI
10.4028/www.scientific.net/AMR.227.105
Citation
N. Ikhlef, M. Mekidèche, O. Leroy, A. Tibouche, "Electromagnetic Modeling of Microwave Axial Injection Torch at Atmospheric Pressure Used for Thin Film Deposition", Advanced Materials Research, Vol. 227, pp. 105-110, 2011
Online since
April 2011
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$32.00
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