Paper Title:
Electrical Characterization of Inductively Coupled Plasma Reactor Excited by RF (13.56MHz)
  Abstract

In the surface treatment by plasma, the saturation ion current is the macroscopic parameter which can give us information on the ionic density in plasma. For this, we followed the evolution of the saturation ion current versus the pressure and power. Our experimental setup consists of spherical plasma reactor linked with inductively source argon plasma and probe to measure ionic current. The obtained experimental results enabled us to highlight the effect of pressure and power on saturation ion current. We found in this study that the saturation ion current increases with pressure and presents an optimum depending on the power.

  Info
Periodical
Edited by
El-Hachemi Amara and Djamila Bennaceur-Doumaz
Pages
185-188
DOI
10.4028/www.scientific.net/AMR.227.185
Citation
M. M. Alim, M. Zekara, L. Henni, R. Tadjine, K. Henda, "Electrical Characterization of Inductively Coupled Plasma Reactor Excited by RF (13.56MHz)", Advanced Materials Research, Vol. 227, pp. 185-188, 2011
Online since
April 2011
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Price
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