Paper Title:
Mini-Nano-Displacement Measurement with Double Diffraction Grating
  Abstract

Based on Doppler and Fourier optics analysis method, analyzed the configuration of double diffraction grating, and built its non-contact optical measurement mathematic model. And built double diffraction grating interference displacement measurement system, the design of double diffraction light path can compensate the deflection angle of grating moving, greatly improved tolerance of grating’s deflection. The compact and micro configuration of its light path, shorten optical distance, improving system’s environment anti-interference ability. Experimental resulting show, within 20nm displacement measurement, and<50mm/sec measurement speed, the system resolution is 1nm and measurement precision is less than 30nm.

  Info
Periodical
Advanced Materials Research (Volumes 230-232)
Edited by
Ran Chen and Wenli Yao
Pages
1159-1163
DOI
10.4028/www.scientific.net/AMR.230-232.1159
Citation
M. L. Jiang, F. P. Li, X. D. Wang, "Mini-Nano-Displacement Measurement with Double Diffraction Grating", Advanced Materials Research, Vols. 230-232, pp. 1159-1163, 2011
Online since
May 2011
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Price
$32.00
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