Paper Title:
Lengthwise Detection of High Linearity Micromachined Gyroscope
  Abstract

This paper introduces the basic working principle of capacitive micromachined gyroscope. A novel differential lengthwise capacitance comb detection structure is put forward. And it also analyzes the linearity of the differential lengthwise capacitive comb detection structure compares to the transversal detection. By measuring the scale factor, it verifies the high linearity of lengthwise differential capacitive detection structure. The linearity insures the linearity of conversing section of the detect system’s displacement and the capacitive variation. And this will greatly improve the linearity and stability of micromachined gyroscope.

  Info
Periodical
Advanced Materials Research (Volumes 230-232)
Edited by
Ran Chen and Wenli Yao
Pages
529-533
DOI
10.4028/www.scientific.net/AMR.230-232.529
Citation
F. L. Yao, S. Q. Gao, X. J. Liang, "Lengthwise Detection of High Linearity Micromachined Gyroscope", Advanced Materials Research, Vols. 230-232, pp. 529-533, 2011
Online since
May 2011
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Price
$32.00
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