Paper Title:
A Study on the Process of ZnO Thin Films Prepared by Ion Beam Sputtering
  Abstract

Based on the ion beam sputtering deposition technology, we adopted the reactive sputtering deposition method to accomplish the coating on the glass substrata with ZnO thin films. We used the four-factor and three-level L9(34) orthogonal experiment to obtain the best technological parameters of deposited ZnO thin films: discharge voltage 3.5KV, oxygen current capacity 8SCCM, the coil current 8A, the distance between target and substrata 140mm. The purity of the deposited ZnO thin film is 85.77%, and it has the good crystallization in orientation. The experimental results show that research and development of the ion beam sputtering source is advanced and has a good application value, and the ion beam sputtering deposition technology can be used to deposit the preferred orientation thin films with good performance. The findings have provided the experimental result and the beneficial reference for the ion beam sputtering deposition research.

  Info
Periodical
Advanced Materials Research (Volumes 233-235)
Edited by
Zhong Cao, Lixian Sun, Xueqiang Cao, Yinghe He
Pages
2399-2402
DOI
10.4028/www.scientific.net/AMR.233-235.2399
Citation
S. J. Wu, W. Shi, J. H. Su, W. Q. Wang, "A Study on the Process of ZnO Thin Films Prepared by Ion Beam Sputtering", Advanced Materials Research, Vols. 233-235, pp. 2399-2402, 2011
Online since
May 2011
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Price
$32.00
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