The two-step anodization process was adopted for the preparation of Al/Al2O3 (AAO) template with about 100 nm porous diameter. Then, the semi-terminated silica nanotubes were synthesized with the AAO template by the sol-gel method. The AAO template and semi-terminated silica nanotubes were observed by Scanning Electron Microscope (SEM) and Transmission Electron Microscope (TEM). The results showed that the porous diameter was increased with the increasing of the electrolyte concentration, the electrolysis temperature and the anodic oxidation voltage, respectively. The formation of semi-terminated silicon nanotubes might be important relationship with the method of embedding silane sol into the porous, drying temperature and drying time of AAO template with the sol-gel silica precursor.