Paper Title:
Effect of Catalysts on Preparation of Sol-Gel Derived Si02 Antireflective Coating
  Abstract

Based on TEOS system and sol-gel process, together with catalysts, the microstructure of SiO2 particles in the sol is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show that adjusting catalytic agent can effectively effect the structure of SiO2 thin film.

  Info
Periodical
Advanced Materials Research (Volumes 239-242)
Edited by
Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He
Pages
1313-1316
DOI
10.4028/www.scientific.net/AMR.239-242.1313
Citation
Y. C. Wang, R. M. Jin, "Effect of Catalysts on Preparation of Sol-Gel Derived Si02 Antireflective Coating", Advanced Materials Research, Vols. 239-242, pp. 1313-1316, 2011
Online since
May 2011
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