Paper Title:
Influence of Substrate Temperature on the Properties of Al-Doped Zinc Oxide Films Prepared by DC Reactive Magnetron Sputtering
  Abstract

Transparent and conductive c-axis oriented aluminum-doped zinc oxide (AZO) films have been prepared on glass substrate by dc reactive magnetron sputtering process. The structural, optical and electrical properties of the films were characterized by scanning electron microscope (SEM), X-ray diffraction (XRD), UV-Visible spectrophotometer and Hall effect measurement system. As the substrate temperature increased, the results showed that grain size of the AZO films gradually increased, the films had a strong c-axis oriented and the crystallization of films became better. The absorption edge first shows a red shift, and then switches to the blue shift with increasing substrate temperature. Optical band gap of AZO films first decreases and then increases with increasing substrate temperature. Resistivity of AZO films decreases with increasing substrate temperature but the rate of decline of resistivity becomes slow after substrate temperature reaches 250 °C. The carriers concentration of AZO films increases with substrate temperature increase.

  Info
Periodical
Advanced Materials Research (Volumes 239-242)
Edited by
Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He
Pages
1626-1632
DOI
10.4028/www.scientific.net/AMR.239-242.1626
Citation
C. H. Yang, Z. Q. Ma, "Influence of Substrate Temperature on the Properties of Al-Doped Zinc Oxide Films Prepared by DC Reactive Magnetron Sputtering", Advanced Materials Research, Vols. 239-242, pp. 1626-1632, 2011
Online since
May 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Sang Moo Park, Takashi Tomemori, Tomoaki Ikegami, Kenji Ebihara
Abstract:High-quality transparent conductive Al-doped ZnO (AZO) thin films were deposited by pulsed laser deposition on quartz glass substrates at...
211
Authors: Yue Bo Wu, Sheng Lei, Zhe Wang, Ru Hai Zhao, Lei Huang, Hui Li
Abstract:The Al-doped ZnO (AZO) films were deposited on the glass substrates by RF magnetron sputtering at different substrate temperatures. The...
1293
Authors: Yi Hua Sun, Chen Hui Li, Wei Hao Xiong, Cai Hua Huang
Thin Films
Abstract:Transparent conducting aluminum-doped zinc oxide (AZO) films have been prepared on soda-lime glass substrates by radio frequency magnetron...
2308
Authors: Yun Hae Kim, Seung Jun An, Joon Young Kim, Kyung Man Moon, Pang Pang Wang, Dong Yan Zhang, Ri Ichi Murakami
New Functional Materials
Abstract:TCO (transparent conducting oxide) films are widely used as photoelectric devices in flat panel displays and solar cells. Until now, ITO...
54