Paper Title:
The Relationship between the Initial Gas Ratios and the Condensed Phase Composition in the CVD of BxC with BCl3-CH4-H2 Precursors
  Abstract

For the preparation of the self-healing phase BxC with BCl3-CH4-H2 precursors, the production has been examined as a function of the initial gas ratios of BCl3/(BCl3+CH4) and H2/(BCl3+CH4) at given temperature and pressure. The results show that the composition of the condensed phase is quite sensitive to the molar ratio of BCl3/(BCl3+CH4) and H2/(BCl3+CH4). The ideal condition for the deposition of BxC is that the ratio of BCl3/(BCl3+CH4) is 0.8 and the H2/(BCl3+CH4) ratio ranges from 10 to 105.2. The carbon or boron-rich material is mainly controlled by the ratios of BCl3/(BCl3+CH4) and H2/(BCl3+CH4). The deposition condition of carbon-rich phase should be in low BCl3/(BCl3+CH4) (0.0~0.8) and H2/(BCl3+CH4) (10-2<102) ratios, whereas that of the boron-rich phase needs high BCl3/(BCl3+CH4) (0.8~1.0) and H2/(BCl3+CH4) (104~105) ratios.

  Info
Periodical
Advanced Materials Research (Volumes 239-242)
Edited by
Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He
Pages
1761-1765
DOI
10.4028/www.scientific.net/AMR.239-242.1761
Citation
J. L. Deng, L. F. Cheng, L. N. Gao, K. H. Su, "The Relationship between the Initial Gas Ratios and the Condensed Phase Composition in the CVD of BxC with BCl3-CH4-H2 Precursors", Advanced Materials Research, Vols. 239-242, pp. 1761-1765, 2011
Online since
May 2011
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