Paper Title:
Simulation Research of the Effect of Thermal Reflow Processing Parameters on the Profile of Micro-Spherical Structure
  Abstract

In this paper reflow process is integrated into LIGA process in order to realize three dimensional fabrication. The melting and deformation process of photoresist, which has an initial cylindrical shape of D500μm and h66μm, and the influence of various processing parameters on the height of formed microlens, is simulated with Marc. The optimum processing parameters combination is obtained by orthogonal experiment method and the influence of different processing parameters on the height of micro-spherical structure is studied with single factor experiment method. The results showed that the optimum processing parameters combination was 1°C /s for heating rate, 110°C for heating temperature and 45min for holding time; the significance of processing parameters on the micro-spherical structure’s height can be ordered in holding time>heating rate>heating temperature.

  Info
Periodical
Advanced Materials Research (Volumes 239-242)
Edited by
Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He
Pages
517-523
DOI
10.4028/www.scientific.net/AMR.239-242.517
Citation
B. Y. Jiang, L. Chen, D. B. Li, S. Kirchberg, "Simulation Research of the Effect of Thermal Reflow Processing Parameters on the Profile of Micro-Spherical Structure", Advanced Materials Research, Vols. 239-242, pp. 517-523, 2011
Online since
May 2011
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Price
$32.00
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