Paper Title:
Screening Test of Phosphoric Acid-BTA Slurries for Copper ECMP Based on Static Inhibition Efficiency
  Abstract

An ECMP slurry screening protocol is proposed based on inhibition efficiency of inhibitor in copper static corrosion test, aiming at enhancing the planarization efficiency of copper ECMP slurries. The elctrochemical properties of copper in electrolytes including H3PO4 and BTA with different concentrations are studied basing on Linear Sweep Voltammetry (LSV) and chronoamperometry under static corrosion states. According to analysis of the anodic current, material removal rate (MRR) and inhibition efficiency of BTA, an electrolyte formula of 30 wt% H3PO4+0.01M BTA is sort out and the anodic potential on copper should be set below 0.5 V.

  Info
Periodical
Advanced Materials Research (Volumes 239-242)
Edited by
Zhong Cao, Xueqiang Cao, Lixian Sun, Yinghe He
Pages
920-923
DOI
10.4028/www.scientific.net/AMR.239-242.920
Citation
W. J. Zhai, Y. Z. Yang, "Screening Test of Phosphoric Acid-BTA Slurries for Copper ECMP Based on Static Inhibition Efficiency", Advanced Materials Research, Vols. 239-242, pp. 920-923, 2011
Online since
May 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: J. Marciniak, W. Chrzanowski, G. Nawrat, J. Zak, B. Rajchel
387
Authors: Seong Jong Kim, Jeong Il Kim
Abstract:This paper investigated the effects of anodizing time on the formation of anodic oxide films on a Mg-Al alloy in alkaline solution. The...
686
Authors: Li Zhen Wang, Yan Juan Han, Kai Qing Zhang, Kun Wang
Abstract:The electrochemical behaviors of zinc electrode containing Bi, In and Al were tested to study aluminum acting on the electrochemical...
590
Authors: Xue Tao Yuan, Xu Dong Lv, Zhi Qiang Hua, Lei Wang, Tao Li
Chapter 4: Metallurgy Materials and Environmental Engineering
Abstract:Anodic polarization behavior of ternary alloy Pb-0.08%Ca-1%Sn is studied by potentiodynamic polarization measurements, corrosion rate, the...
349