Paper Title:
Experimental Study on Cryogenic Polishing Single Silicon Wafer with Nano-Sized Cerium Dioxide Powders
  Abstract

Cryogenic polishing single silicon wafer with nano-sized CeO2 abrasives can be known as cryogenic fixed abrasives CMP (CFA-CMP). The abrasive slurry was made of nano-sized CeO2 particles dispersed in de-ionized water with a surfactant and the polishing slurry froze to form cryogenic polishing pad. Then the polishing tests of the blanket silicon wafers in the presence of the cryogenic polishing pad containing the nano-particulates were carried out. The morphologies and surfaces roughness of the polished silicon wafers were observed and examined on an atomic force microscope (AFM). The results show that a super smooth surface with roughness of 0. 293 nm is obtained within 5000 nm× 5000 nm and the removal of material is dominated by plastic flowage.

  Info
Periodical
Advanced Materials Research (Volumes 24-25)
Edited by
Hang Gao, Zhuji Jin and Yannian Rui
Pages
177-182
DOI
10.4028/www.scientific.net/AMR.24-25.177
Citation
Y. L. Sun, D. W. Zuo, Y. W. Zhu, R. F. Chen, D.S. Li, M. Wang, "Experimental Study on Cryogenic Polishing Single Silicon Wafer with Nano-Sized Cerium Dioxide Powders", Advanced Materials Research, Vols. 24-25, pp. 177-182, 2007
Online since
September 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Yu Fen Yang, Guo Sheng Gai, Xiang Yang Hao, Q.R. Chen
Abstract:The purpose of the work is to investigate the problems associated with utilization of purified fly ash (PFA) as filler in polymer. The goal...
2100
Authors: Chien Chen Diao, Chia Ching Wu, Cheng Fu Yang, Chao Chin Chan
Abstract:In this study, 0.95 (Na0.5Bi0.5)TiO3-0.05 BaTiO3 + 1 wt% Bi2O3 (NBT-BT3) composition sintered at 1200oC for 2h is used as target to deposit...
263
Authors: Cheng Fu Yang, Wen Cheng Tzou
Chapter 1: Materials Engineering and Processing Technologies of Materials
Abstract:Sr0.4Ba0.6Nb1.85Ta0.15O6 (SBNT) ceramic was used as a target and SBNT thin films were deposited at room temperature. After deposition, the...
193
Authors: Dan Hua Zhao, Xiu Lian Zhang, Wei Yin, Xiao Jun Liu
Chapter 11: Environmental. Research, Friendly Materials and Recycling Waste Technologies
Abstract:CaF2/AG25 (CFA) hybrid sorbent formed by hybrid reaction with activated calcium fluoride of low cost and anionic dye...
1571