Paper Title:
Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches
  Abstract

In this paper, studies on “quasi-static” region of ohmic-contact behavior for MEMS switches under low contact force and low current conditions were carried out. Random telegraph signals (RTS) observed during the transition period were carefully investigated. It is found that RTS in transition region could be consistently identified by multiple characteristic time constants. The RTS behavior with multiple time constants suggests that different contact mechanisms could involve during “quasi-static” contact region. A dominant mechanism with time constant of ~1 ms was observed for the Au-to-Au contacts used in this study.

  Info
Periodical
Edited by
Lynn Khine and Julius M. Tsai
Pages
136-139
DOI
10.4028/www.scientific.net/AMR.254.136
Citation
H. D. Qiu, H. Wang, "Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches", Advanced Materials Research, Vol. 254, pp. 136-139, 2011
Online since
May 2011
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